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Advanced ALD Processes ALD beyond semiconductor process; prospective applications aiming mass-production
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박태주 | - |
| dc.date.accessioned | 2021-06-22T10:27:35Z | - |
| dc.date.available | 2021-06-22T10:27:35Z | - |
| dc.date.issued | 2019-11-14 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/3621 | - |
| dc.title | Advanced ALD Processes ALD beyond semiconductor process; prospective applications aiming mass-production | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국표면공학회 추계학술대회 | - |
| dc.citation.conferencePlace | 대한민국/경주 드림센터 | - |
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Related Researcher
- Park, Tae Joo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)