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Plasma CVD에 의한 DLC 박막 제작시 수소가스의 영향
- Authors
- 박진석
- Issue Date
- 1-Jul-1996
- Conference Name
- 대한전기학회 하계학술대회논문집
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Related Researcher
- PARK, JIN SEOK
- ERICA 공학대학 (SCHOOL OF ELECTRICAL ENGINEERING)