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Direct Fabrication of Arbitrary-Shaped Ferroelectric Nanostructures on Plastic, Glass, and Silicon Substrates
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Suenne | - |
| dc.contributor.author | Bastani, Yaser | - |
| dc.contributor.author | Lu, Haidong | - |
| dc.contributor.author | King, William P. | - |
| dc.contributor.author | Marder, Seth | - |
| dc.contributor.author | Sandhage, Kenneth H. | - |
| dc.contributor.author | Gruverman, Alexei | - |
| dc.contributor.author | Riedo, Elisa | - |
| dc.contributor.author | Bassiri-Gharb, Nazanin | - |
| dc.date.accessioned | 2021-06-23T10:37:51Z | - |
| dc.date.available | 2021-06-23T10:37:51Z | - |
| dc.date.issued | 2011-09 | - |
| dc.identifier.issn | 0935-9648 | - |
| dc.identifier.issn | 1521-4095 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/37198 | - |
| dc.description.abstract | A complementary metal-oxide-semiconductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52Ti0.48)O(3)and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width >= 30 nm, spheres with diameter >= 10 nm, and densities up to 213 Gb in(-2) are produced. | - |
| dc.format.extent | 5 | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.publisher | WILEY-V C H VERLAG GMBH | - |
| dc.title | Direct Fabrication of Arbitrary-Shaped Ferroelectric Nanostructures on Plastic, Glass, and Silicon Substrates | - |
| dc.type | Article | - |
| dc.publisher.location | 독일 | - |
| dc.identifier.doi | 10.1002/adma.201101991 | - |
| dc.identifier.scopusid | 2-s2.0-80052156425 | - |
| dc.identifier.wosid | 000295200400006 | - |
| dc.identifier.bibliographicCitation | ADVANCED MATERIALS, v.23, no.33, pp 3786 - 3790 | - |
| dc.citation.title | ADVANCED MATERIALS | - |
| dc.citation.volume | 23 | - |
| dc.citation.number | 33 | - |
| dc.citation.startPage | 3786 | - |
| dc.citation.endPage | 3790 | - |
| dc.type.docType | Article | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | sci | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Chemistry | - |
| dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
| dc.relation.journalResearchArea | Materials Science | - |
| dc.relation.journalResearchArea | Physics | - |
| dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary | - |
| dc.relation.journalWebOfScienceCategory | Chemistry, Physical | - |
| dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
| dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
| dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
| dc.subject.keywordPlus | THIN-FILMS | - |
| dc.subject.keywordPlus | THERMOCHEMICAL NANOLITHOGRAPHY | - |
| dc.subject.keywordPlus | PB(ZR,TI)O-3 | - |
| dc.subject.keywordPlus | DENSITY | - |
| dc.subject.keywordAuthor | Soda lime glass substrate | - |
| dc.subject.keywordAuthor | Nano-manufacturing | - |
| dc.subject.keywordAuthor | Glass | - |
| dc.subject.keywordAuthor | Silicon substrates | - |
| dc.subject.keywordAuthor | Sol-gel precursors | - |
| dc.subject.keywordAuthor | Nanostructures | - |
| dc.subject.keywordAuthor | Ferroelectric nanostructures | - |
| dc.subject.keywordAuthor | Nanolithography | - |
| dc.subject.keywordAuthor | Complementary metal oxide semiconductors | - |
| dc.subject.keywordAuthor | Substrates | - |
| dc.subject.keywordAuthor | Zirconium | - |
| dc.subject.keywordAuthor | thermochemical nanolithography | - |
| dc.subject.keywordAuthor | F | - |
| dc.identifier.url | https://onlinelibrary.wiley.com/doi/10.1002/adma.201101991 | - |
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Related Researcher
- Kim, Su enne
- ERICA 첨단융합대학 (ERICA 반도체·디스플레이공학전공)