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Direct Fabrication of Arbitrary-Shaped Ferroelectric Nanostructures on Plastic, Glass, and Silicon Substrates
- Authors
- Kim, Suenne; Bastani, Yaser; Lu, Haidong; King, William P.; Marder, Seth; Sandhage, Kenneth H.; Gruverman, Alexei; Riedo, Elisa; Bassiri-Gharb, Nazanin
- Issue Date
- Sep-2011
- Publisher
- WILEY-V C H VERLAG GMBH
- Keywords
- Soda lime glass substrate; Nano-manufacturing; Glass; Silicon substrates; Sol-gel precursors; Nanostructures; Ferroelectric nanostructures; Nanolithography; Complementary metal oxide semiconductors; Substrates; Zirconium; thermochemical nanolithography; F
- Citation
- ADVANCED MATERIALS, v.23, no.33, pp 3786 - 3790
- Pages
- 5
- Indexed
- SCI
SCIE
SCOPUS
- Journal Title
- ADVANCED MATERIALS
- Volume
- 23
- Number
- 33
- Start Page
- 3786
- End Page
- 3790
- ISSN
- 0935-9648
1521-4095
- Abstract
- A complementary metal-oxide-semiconductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52Ti0.48)O(3)and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width >= 30 nm, spheres with diameter >= 10 nm, and densities up to 213 Gb in(-2) are produced.
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Related Researcher
- Kim, Su enne
- ERICA 첨단융합대학 (ERICA 반도체·디스플레이공학전공)