Direct Fabrication of Arbitrary-Shaped Ferroelectric Nanostructures on Plastic, Glass, and Silicon Substrates
- Authors
- Kim, Suenne; Bastani, Yaser; Lu, Haidong; King, William P.; Marder, Seth; Sandhage, Kenneth H.; Gruverman, Alexei; Riedo, Elisa; Bassiri-Gharb, Nazanin
- Issue Date
- Sep-2011
- Publisher
- WILEY-V C H VERLAG GMBH
- Keywords
- Soda lime glass substrate; Nano-manufacturing; Glass; Silicon substrates; Sol-gel precursors; Nanostructures; Ferroelectric nanostructures; Nanolithography; Complementary metal oxide semiconductors; Substrates; Zirconium; thermochemical nanolithography; F
- Citation
- ADVANCED MATERIALS, v.23, no.33, pp.3786 - 3790
- Indexed
- SCIE
SCOPUS
- Journal Title
- ADVANCED MATERIALS
- Volume
- 23
- Number
- 33
- Start Page
- 3786
- End Page
- 3790
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/37198
- DOI
- 10.1002/adma.201101991
- ISSN
- 0935-9648
- Abstract
- A complementary metal-oxide-semiconductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52Ti0.48)O(3)and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width >= 30 nm, spheres with diameter >= 10 nm, and densities up to 213 Gb in(-2) are produced.
- Files in This Item
-
Go to Link
- Appears in
Collections - COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF PHOTONICS AND NANOELECTRONICS > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/37198)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.