Random yield loss during wafer cleaning
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Venkatesh, R. Prasanna | - |
dc.contributor.author | Lim, Jung-Soo | - |
dc.contributor.author | Park, Jin-Goo | - |
dc.date.accessioned | 2021-06-23T11:04:05Z | - |
dc.date.available | 2021-06-23T11:04:05Z | - |
dc.date.created | 2021-01-21 | - |
dc.date.issued | 2011-04 | - |
dc.identifier.issn | 0038-111X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/38186 | - |
dc.description.abstract | The cleaning process performance in both conventional wet-bath and a single-wafer processor was evaluated. Experiments performed in this study were primarily oriented toward the determination of the number of particles added onto the wafer by using various pumping methods. In particular, the impact of pump-induced particles on silicon wafer cleaning in DI water was investigated. The random yield of ICs was estimated from the particle count data using various correlations including a negative binomial model. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | PennWell Corp. | - |
dc.title | Random yield loss during wafer cleaning | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Jin-Goo | - |
dc.identifier.scopusid | 2-s2.0-79955416304 | - |
dc.identifier.wosid | 000289273300005 | - |
dc.identifier.bibliographicCitation | Solid State Technology, v.54, no.4, pp.16 - 18 | - |
dc.relation.isPartOf | Solid State Technology | - |
dc.citation.title | Solid State Technology | - |
dc.citation.volume | 54 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | 16 | - |
dc.citation.endPage | 18 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.identifier.url | https://www.proquest.com/docview/861490347?accountid=11283 | - |
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