Measurement of nonuniform bowing in GaN/sapphire epi-wafers and subsequent stress analysis by using a theoretical model
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jang, Yuseong | - |
dc.contributor.author | Jang, Dong-Hyun | - |
dc.contributor.author | Shim, Jong-In | - |
dc.contributor.author | Shin, Dong Soo | - |
dc.date.accessioned | 2021-06-23T12:04:28Z | - |
dc.date.available | 2021-06-23T12:04:28Z | - |
dc.date.issued | 2011-03 | - |
dc.identifier.issn | 0277-786X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/39123 | - |
dc.description.abstract | We present our approach to measure the profile of nonuniformly bent GaN epi-wafers grown on sapphire substrates. By using a laser displacement sensor, the position of the epi-wafer is accurately measured and mapped. From the measured profile data, analysis of stress distributions over the nonuniformly bent wafer is performed by using a theoretical model. We show the result of theoretical analysis of how the stress tensors distribute over a wafer. The estimated stress tensors are related with optical properties such as photoluminescence of the wafer. © 2011 SPIE. | - |
dc.format.extent | 9 | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | SPIE | - |
dc.title | Measurement of nonuniform bowing in GaN/sapphire epi-wafers and subsequent stress analysis by using a theoretical model | - |
dc.type | Article | - |
dc.publisher.location | 미국 | - |
dc.identifier.doi | 10.1117/12.874127 | - |
dc.identifier.scopusid | 2-s2.0-79955766420 | - |
dc.identifier.wosid | 000298084200043 | - |
dc.identifier.bibliographicCitation | Proceedings of SPIE - The International Society for Optical Engineering, v.7939, pp 1 - 9 | - |
dc.citation.title | Proceedings of SPIE - The International Society for Optical Engineering | - |
dc.citation.volume | 7939 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 9 | - |
dc.type.docType | Conference Paper | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Optics | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Optics | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | GaN | - |
dc.subject.keywordPlus | GaN/sapphire | - |
dc.subject.keywordPlus | Laser displacement sensors | - |
dc.subject.keywordPlus | nonuniform bow | - |
dc.subject.keywordPlus | Profile data | - |
dc.subject.keywordPlus | Sapphire substrates | - |
dc.subject.keywordPlus | Stress distribution | - |
dc.subject.keywordPlus | Stress tensors | - |
dc.subject.keywordPlus | Theoretical models | - |
dc.subject.keywordPlus | Time-resolved photoluminescence | - |
dc.subject.keywordPlus | wafer stress | - |
dc.subject.keywordPlus | Gallium alloys | - |
dc.subject.keywordPlus | Optical properties | - |
dc.subject.keywordPlus | Photoluminescence | - |
dc.subject.keywordPlus | Stress analysis | - |
dc.subject.keywordPlus | Stress concentration | - |
dc.subject.keywordPlus | Tensors | - |
dc.subject.keywordPlus | Gallium nitride | - |
dc.subject.keywordAuthor | GaN | - |
dc.subject.keywordAuthor | nonuniform bow | - |
dc.subject.keywordAuthor | time-resolved photoluminescence | - |
dc.subject.keywordAuthor | wafer stress | - |
dc.identifier.url | https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7939/1/Measurement-of-nonuniform-bowing-in-GaN-sapphire-epi-wafers-and/10.1117/12.874127.short | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr
COPYRIGHT © 2021 HANYANG UNIVERSITY. ALL RIGHTS RESERVED.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.