Conformal Coating of Conductive ZnO:Al Films as Transparent Electrodes on High Aspect Ratio Si Microrods
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kong, Bo Hyun | - |
dc.contributor.author | Choi, Mi Kyung | - |
dc.contributor.author | Cho, Hyung Koun | - |
dc.contributor.author | Kim, Jae Hyun | - |
dc.contributor.author | Baek, Sungho | - |
dc.contributor.author | Lee, Jung-Ho | - |
dc.date.accessioned | 2021-06-23T14:38:52Z | - |
dc.date.available | 2021-06-23T14:38:52Z | - |
dc.date.created | 2021-01-21 | - |
dc.date.issued | 2010 | - |
dc.identifier.issn | 1099-0062 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/40569 | - |
dc.description.abstract | Al-doped ZnO (AZO) thin films were grown by atomic layer deposition (ALD) for use as transparent conductive oxides on high aspect ratio Si microrod arrays. The ALD-deposited AZO films showed high optical transmittance and electrical conductivity despite their polycrystalline structures and resulted in a superior conformal coating on the surface and side regions of the Si microrods. The films also exhibited an electrical performance identical to that of the AZO film on a flat Si substrate. These results revealed that ALD-deposited AZO films are promising candidates for electrodes in the next-generation optoelectronic devices based on low dimensional structures, which require conformal coating. (C) 2009 The Electrochemical Society. [DOI: 10.1149/1.3267051] All rights reserved. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | Electrochemical Society, Inc. | - |
dc.title | Conformal Coating of Conductive ZnO:Al Films as Transparent Electrodes on High Aspect Ratio Si Microrods | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Lee, Jung-Ho | - |
dc.identifier.doi | 10.1149/1.3267051 | - |
dc.identifier.scopusid | 2-s2.0-74249113901 | - |
dc.identifier.wosid | 000272838700024 | - |
dc.identifier.bibliographicCitation | Electrochemical and Solid-State Letters, v.13, no.2, pp.K12 - K14 | - |
dc.relation.isPartOf | Electrochemical and Solid-State Letters | - |
dc.citation.title | Electrochemical and Solid-State Letters | - |
dc.citation.volume | 13 | - |
dc.citation.number | 2 | - |
dc.citation.startPage | K12 | - |
dc.citation.endPage | K14 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Electrochemistry | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalWebOfScienceCategory | Electrochemistry | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.subject.keywordPlus | ATOMIC LAYER DEPOSITION | - |
dc.subject.keywordPlus | LIGHT-EMITTING DEVICES | - |
dc.subject.keywordPlus | SOLAR-CELLS | - |
dc.subject.keywordPlus | SILICON NANOWIRES | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | OXIDE | - |
dc.subject.keywordPlus | ABSORPTION | - |
dc.subject.keywordPlus | SCATTERING | - |
dc.subject.keywordAuthor | THIN-FILMS | - |
dc.subject.keywordAuthor | SOLAR-CELLS | - |
dc.subject.keywordAuthor | OXIDE | - |
dc.subject.keywordAuthor | SILICON NANOWIRES | - |
dc.subject.keywordAuthor | LIGHT-EMITTING DEVICES | - |
dc.subject.keywordAuthor | ABSORPTION | - |
dc.subject.keywordAuthor | ATOMIC LAYER DEPOSITION | - |
dc.subject.keywordAuthor | SCATTERING | - |
dc.identifier.url | https://iopscience.iop.org/article/10.1149/1.3267051 | - |
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