티타늄 카바이드가 코팅된 탄소나노튜브 미세팁 이미터의 전계방출 특성 분석

Abstract

Thin films (< 30 nm) of titanium carbide (TiC) are coated on carbon nanotubes (CNTs), which are directly grown on nano-sized (~ 500 nm in diameter) conical-type tungsten (W) tips, by employing an inductively coupled plasma-chemical vapor deposition (ICP-CVD) technique. Any modification in structural properties (such as length to diameter ratio, crystal quality, and growth behavior) of CNTs due to TiC-coating has been monitored by using high- resolution TEM, field-emission SEM, and Raman spectroscopy. Driving voltage for obtaining the same level of emission current in CNTs-emitter is significantly reduced by TiC-coating. It is also worthy of being noted that the degradation of emission current due to prolonged operation (up to 30 h) is remarkably suppressed by TiC-coating.