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Effect of ozone supply methods on PRE in alkaline ozone solutions
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Seung Ho | - |
| dc.contributor.author | Kim, Tae Gon | - |
| dc.contributor.author | Kwon, Tae Young | - |
| dc.contributor.author | Park, Jin-Goo | - |
| dc.contributor.author | Bae, So Ik | - |
| dc.contributor.author | Lee, Gun Ho | - |
| dc.contributor.author | Kim, In Jung | - |
| dc.date.accessioned | 2021-06-23T18:40:32Z | - |
| dc.date.available | 2021-06-23T18:40:32Z | - |
| dc.date.issued | 2008-00 | - |
| dc.identifier.issn | 1012-0394 | - |
| dc.identifier.issn | 1662-9779 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/43062 | - |
| dc.description.abstract | Ozonated DI water was supplied to make alkaline cleaning solutions to replace SC1 chemicals in a bath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lower particle removal efficiency (PRE) of 75%. However, direct supply of ozonated water with NH4OH to a bath without recirculation resulted in higher PRE over 93 %. © (2008) Trans Tech Publications, Switzerland. | - |
| dc.format.extent | 4 | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.publisher | Scitec Publications Ltd. | - |
| dc.title | Effect of ozone supply methods on PRE in alkaline ozone solutions | - |
| dc.type | Article | - |
| dc.publisher.location | 스위스 | - |
| dc.identifier.doi | 10.4028/www.scientific.net/SSP.134.237 | - |
| dc.identifier.scopusid | 2-s2.0-38549110607 | - |
| dc.identifier.wosid | 000253389300055 | - |
| dc.identifier.bibliographicCitation | Solid State Phenomena, v.134, pp 237 - 240 | - |
| dc.citation.title | Solid State Phenomena | - |
| dc.citation.volume | 134 | - |
| dc.citation.startPage | 237 | - |
| dc.citation.endPage | 240 | - |
| dc.type.docType | Conference Paper | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Engineering | - |
| dc.relation.journalResearchArea | Materials Science | - |
| dc.relation.journalResearchArea | Physics | - |
| dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
| dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
| dc.subject.keywordPlus | Alkalinity | - |
| dc.subject.keywordPlus | Ammonium hydroxide | - |
| dc.subject.keywordPlus | Cleaning | - |
| dc.subject.keywordPlus | Alkaline cleaning | - |
| dc.subject.keywordPlus | Alkaline solutions | - |
| dc.subject.keywordPlus | Dissolved ozone | - |
| dc.subject.keywordPlus | Ozonated water | - |
| dc.subject.keywordPlus | Ozone supply | - |
| dc.subject.keywordPlus | Particle removal | - |
| dc.subject.keywordPlus | Particle removal efficiency | - |
| dc.subject.keywordPlus | Recirculations | - |
| dc.subject.keywordPlus | Ozone | - |
| dc.subject.keywordAuthor | Additive gases | - |
| dc.subject.keywordAuthor | Alkaline solution | - |
| dc.subject.keywordAuthor | Ozone | - |
| dc.subject.keywordAuthor | Ozone supply methods | - |
| dc.subject.keywordAuthor | Particle removal | - |
| dc.identifier.url | https://www.scientific.net/SSP.134.237 | - |
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)