Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Automated In-line AFM for Surface Profiling in CMP Applications
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김태곤 | - |
| dc.date.accessioned | 2021-06-22T10:45:26Z | - |
| dc.date.available | 2021-06-22T10:45:26Z | - |
| dc.date.issued | 2019-09-17 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/4341 | - |
| dc.title | Automated In-line AFM for Surface Profiling in CMP Applications | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | International Conference on Planarization/CMP Technology | - |
| dc.citation.conferencePlace | Hsinchu, Taiwan | - |
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- KIM, TAE GON
- ERICA 공학대학 (MAJOR IN APPLIED MATERIAL & COMPONENTS)