Nanoparticle scanning and detection on flat and structured surfaces using fluorescence microscopy
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Guldiken, Rasim | - |
dc.contributor.author | Makaram, Prashanth | - |
dc.contributor.author | Bakhtari, Kaveh | - |
dc.contributor.author | Park, Jingoo | - |
dc.contributor.author | Busnaina, Ahmed A. | - |
dc.date.accessioned | 2021-06-23T19:39:53Z | - |
dc.date.available | 2021-06-23T19:39:53Z | - |
dc.date.created | 2021-01-21 | - |
dc.date.issued | 2007-06 | - |
dc.identifier.issn | 1059-910X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/43678 | - |
dc.description.abstract | A new technique is proposed for the scanning and detection of nanoparticles on flat substrates and three-dimensional structures using fluorescence microscopy. This technique is utilized for particle removal measurements especially in semiconductor and hard disk manufacturing. This fluorescent particle scanning technique enables nanoscale particle detection. The technique shows that single particles down to 63 nm could be detected and counted. The technique is also capable of detecting particles in trenches that are as deep as 500 pm. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | John Wiley & Sons Inc. | - |
dc.title | Nanoparticle scanning and detection on flat and structured surfaces using fluorescence microscopy | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Jingoo | - |
dc.identifier.doi | 10.1002/jemt.20477 | - |
dc.identifier.scopusid | 2-s2.0-34250337770 | - |
dc.identifier.wosid | 000247081200007 | - |
dc.identifier.bibliographicCitation | Microscopy Research and Technique, v.70, no.6, pp.534 - 538 | - |
dc.relation.isPartOf | Microscopy Research and Technique | - |
dc.citation.title | Microscopy Research and Technique | - |
dc.citation.volume | 70 | - |
dc.citation.number | 6 | - |
dc.citation.startPage | 534 | - |
dc.citation.endPage | 538 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Anatomy & Morphology | - |
dc.relation.journalResearchArea | Life Sciences & Biomedicine - Other Topics | - |
dc.relation.journalResearchArea | Microscopy | - |
dc.relation.journalWebOfScienceCategory | Anatomy & Morphology | - |
dc.relation.journalWebOfScienceCategory | Biology | - |
dc.relation.journalWebOfScienceCategory | Microscopy | - |
dc.subject.keywordPlus | LOW-DENSITY-LIPOPROTEIN | - |
dc.subject.keywordPlus | TRACKING | - |
dc.subject.keywordPlus | MOLECULES | - |
dc.subject.keywordAuthor | nanoparticles | - |
dc.subject.keywordAuthor | megasonic | - |
dc.subject.keywordAuthor | fluorescence | - |
dc.subject.keywordAuthor | semiconductor | - |
dc.subject.keywordAuthor | metrology | - |
dc.identifier.url | https://analyticalsciencejournals.onlinelibrary.wiley.com/doi/10.1002/jemt.20477 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr
COPYRIGHT © 2021 HANYANG UNIVERSITY. ALL RIGHTS RESERVED.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.