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분무열분해법에 의하여 제조한 FTO 투명전도막의 F/Sn 비율에 따른 전기, 광학적 특성과 XPS 분석Electrical and optical properties of FTO transparent conducting oxide film by spray pyrolysis and its XPS analysis based on F/Sn ratio
- Other Titles
- Electrical and optical properties of FTO transparent conducting oxide film by spray pyrolysis and its XPS analysis based on F/Sn ratio
- Issue Date
- Jul-2007
- Publisher
- 한국재료학회
- Keywords
- Fluorine doped tin oxide; Spray pyrolysis deposition; Transparent conducting oxide
- Citation
- Korean Journal of Materials Research, v.17, no.7, pp 376 - 381
- Pages
- 6
- Indexed
- SCOPUS
KCI
- Journal Title
- Korean Journal of Materials Research
- Volume
- 17
- Number
- 7
- Start Page
- 376
- End Page
- 381
- ISSN
- 1225-0562
2287-7258
- Abstract
- Fluorine-doped tin oxide (FTO) thin film was coated on aluminosilicate glass at 450°C by spray pyrolysis method. In the range of 0-2.7 molar ratio of F/Sn, the variations of electrical conductivity and visible light transmission were investigated. At the F/Sn ratio of 1.765, the film showed the lowest electrical resistivity value of 3.0×10-4Ω cm, the highest carrier concentration of 2.404×1021/cm3, and about 8 cm2/V sec of electronic mobility. The FTO film showed a preferred orientation of (200) plane parallel to the substrate. X-ray photoelectron spectroscopy analysis results indicated that the contents of Sn4+-O bonding are the highest at 1.765 of F/Sn molar ratio.
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Related Researcher
- CHOA, YONG HO
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)