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Fabrication of stainless steel mold using electro chemical fabrication (ECF) method for microfluidic biochip
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Cho, Min Soo | - |
| dc.contributor.author | Lim, Hyun Woo | - |
| dc.contributor.author | Lee, Caroline Sunyong | - |
| dc.contributor.author | Cho, Byung Ki | - |
| dc.contributor.author | Cho, Young Sik | - |
| dc.contributor.author | Park, Jin-Goo | - |
| dc.date.accessioned | 2021-06-23T20:41:31Z | - |
| dc.date.available | 2021-06-23T20:41:31Z | - |
| dc.date.issued | 2007-11 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/44269 | - |
| dc.description.abstract | In this paper, SUS mold was fabricated using both ECF method and FeCl 3 wet etching. The ECF mold showed the surface roughness values much better than that for FeCl3 etched mold. Therefore, SUS mold was successfully fabricated for the first time in micro-scale and multi-step patterns. Plastic replica was fabricated successfully using the metal mold. | - |
| dc.format.extent | 2 | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.publisher | IEEE | - |
| dc.title | Fabrication of stainless steel mold using electro chemical fabrication (ECF) method for microfluidic biochip | - |
| dc.type | Article | - |
| dc.publisher.location | 미국 | - |
| dc.identifier.doi | 10.1109/IMNC.2007.4456240 | - |
| dc.identifier.scopusid | 2-s2.0-47349087194 | - |
| dc.identifier.wosid | 000253841100166 | - |
| dc.identifier.bibliographicCitation | Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp 334 - 335 | - |
| dc.citation.title | Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC | - |
| dc.citation.startPage | 334 | - |
| dc.citation.endPage | 335 | - |
| dc.type.docType | Conference Paper | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Engineering | - |
| dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
| dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
| dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
| dc.subject.keywordPlus | Iron | - |
| dc.subject.keywordPlus | Molds | - |
| dc.subject.keywordPlus | Nanofluidics | - |
| dc.subject.keywordPlus | Nanotechnology | - |
| dc.subject.keywordPlus | Optical design | - |
| dc.subject.keywordPlus | Biochip | - |
| dc.subject.keywordPlus | Chemical fabrication | - |
| dc.subject.keywordPlus | International (CO) | - |
| dc.subject.keywordPlus | Micro fluidic | - |
| dc.subject.keywordPlus | Micro-processes | - |
| dc.subject.keywordPlus | Steel molds | - |
| dc.subject.keywordPlus | Stainless steel | - |
| dc.identifier.url | https://ieeexplore.ieee.org/document/4456240 | - |
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)