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Synthesis and electrical properties of (Bi1/2Na1/2)TiO3 (BNT) ferroelectric thin films by liquid sprayed mist chemical vapor deposition technique
- Authors
- Kim, Bok-Hee; Kim, Sang-Hee; Kim, Jong-Hwan; Lee, Kun-Jae; Choa, Yong-Ho; Choi, Youn-Kyu; Kim, Spencer S.
- Issue Date
- Nov-2006
- Publisher
- American Scientific Publishers
- Keywords
- lead-free ferroelectric materials; liquid sprayed misted chemical vapor deposition method; electrical property; crystalline orientation
- Citation
- Journal of Nanoscience and Nanotechnology, v.6, no.11, pp 3479 - 3482
- Pages
- 4
- Indexed
- SCIE
SCOPUS
- Journal Title
- Journal of Nanoscience and Nanotechnology
- Volume
- 6
- Number
- 11
- Start Page
- 3479
- End Page
- 3482
- ISSN
- 1533-4880
1533-4899
- Abstract
- This study aims to synthesize lead-free ferroelectric material, (Bi1/2Na1/2)TiO3 using the Liquid Sprayed Mist Chemical Vapor Deposition (LSMCVD) technique. The mist of precursor solution was vaporized and deposited on two different substrates of Si(100) and (111)Pt/TiO2/SiO2/Si(100) in an oxygen atmosphere. The deposition temperature and time were varied in the range of 400-600 degrees C and 30-90 min. (Bi1/2Na1/2)TiO3 thin film had preferred orientations of (110). The thickness of the thin film deposited was 35-162 nm. The remnant polarization (2P(r)) and the dielectric constant were 4.6-16.8 mu C/cm(2), 325-350, respectively.
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Related Researcher
- CHOA, YONG HO
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)