Deep RIE(reactive ion etching)를 이용한 가스 유량센서 제작
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이영태 | - |
dc.contributor.author | 안강호 | - |
dc.contributor.author | 권용택 | - |
dc.contributor.author | Hidekuni Takao | - |
dc.contributor.author | Makoto Ishida | - |
dc.date.accessioned | 2021-06-23T21:05:47Z | - |
dc.date.available | 2021-06-23T21:05:47Z | - |
dc.date.created | 2021-02-18 | - |
dc.date.issued | 2006-10 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/44609 | - |
dc.description.abstract | In this paper, we fabricated drag force type and pressure difference type gas flow sensor with dry etching technology which used Deep RIE(reactive ion etching) and etching stop technology which used SOI(silicon-on-insulator). we fabricated four kinds of sensor, which are cantilever, paddle type, diaphragm, and diaphragm with orifice type. Both cantilever and paddle type flow sensors have similar sensitivity as 0.03mV/V kPa. Sensitivity of the fabricated diaphragm and diaphragm with orifice type sensor were relatively high as about 3.5mV/V kPa, 1.5mV/V kPa respectively. | - |
dc.language | 한국어 | - |
dc.language.iso | ko | - |
dc.publisher | 한국반도체디스플레이기술학회 | - |
dc.title | Deep RIE(reactive ion etching)를 이용한 가스 유량센서 제작 | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | 안강호 | - |
dc.identifier.bibliographicCitation | 한국반도체및디스플레이장비학회 학술대회논문집 | - |
dc.relation.isPartOf | 한국반도체및디스플레이장비학회 학술대회논문집 | - |
dc.citation.title | 한국반도체및디스플레이장비학회 학술대회논문집 | - |
dc.type.rims | ART | - |
dc.description.journalClass | 3 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | other | - |
dc.identifier.url | http://koreascience.or.kr/article/CFKO200625522706862.page?&lang=ko | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr
COPYRIGHT © 2021 HANYANG UNIVERSITY. ALL RIGHTS RESERVED.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.