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Simple structured polydimethylsiloxane microvalve actuated by external air pressure
- Authors
- Lee, S. -W.; Kim, D. -J.; Ahn, Y.; Chai, Y. G.
- Issue Date
- Aug-2006
- Publisher
- PROFESSIONAL ENGINEERING PUBLISHING LTD
- Keywords
- polydimethylsiloxane microvalve; pneumatic actuation; replica moulding
- Citation
- PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE, v.220, no.8, pp.1283 - 1288
- Indexed
- SCIE
SCOPUS
- Journal Title
- PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE
- Volume
- 220
- Number
- 8
- Start Page
- 1283
- End Page
- 1288
- ISSN
- 0954-4062
- Abstract
- This article describes a simple structured microvalve made of polydimethylsiloxane (PDMS) and glass. For easy operation, the microvalve is actuated by external air pressure. The microvalve is fabricated by replica moulding using a negative photoresist (SU-8) as the mould. For low cost and biocompatibility, PDMS is used as the chip material. The PDMS valve is bonded to a Pyrex glass substrate using an O-2 plasma surface treatment. It was found that no leakage occurs under a valve-actuating air pressure of 0.35 MPa when the injection pressure of liquid in the microchannel of the valve is 0.01-0.04 MPa. The fabricated microvalve is applied to a microfluidic chip having one inlet and two outlet channels. Fluid flow is controlled by the microvalve.
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Related Researcher
- Ahn, Yoomin
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)