수소 이온 충돌을 이용한 후처리가 탄소 나노튜브의 구조적 물성 및 전계방출 특성에 미치는 영향

Abstract

Carbon nanotubes (CNTs) are grown on TiN-Coated silicon substrates at 700℃ using an ICP-CVD method. Ni catalysts for CNT growth are formed using an RF magnetron sputtering system. Post-treatment using hydrogen ions has been performed in the ICP reactor by varying the treatment period. The characterization using various techniques, such as FESEM, HRTEM, and Raman spectroscopy, show that the physical dimension as well as the crystal quality of CNTs are changed by the post-treatment process. It is also seen that the hydrogen ion-bombardment may change the surface structure of CNTs, which may lead to produce better electron emission properties. The physical reason for all the measured data obtained are discussed to establish the relationship between the structural property and the electron emission characteristic of CNTs