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Self-Assembled Nanochamber Arrays for in-situ TEM Observation of Liquid-Phase Samples
- Authors
- Lim, Kitaek; Bae, Yuna; Kim, Kihwan; Jeon, Sungho; Kim, Byung Hyo; Park, Jungwon; Lee, Won Chul
- Issue Date
- Oct-2019
- Publisher
- Institute of Electrical and Electronics Engineers Inc.
- Citation
- Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp.105 - 106
- Indexed
- SCIE
SCOPUS
- Journal Title
- Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
- Start Page
- 105
- End Page
- 106
- ISSN
- 1084-6999
- Abstract
- This work presents a highly-ordered array of nanoscale chambers, capable of encapsulating liquid samples for TEM (transmission electron microscopy) imaging. The present nanochambers are formed with two layers of free-standing graphene and self-assembled nanopores in an AAO (anodic aluminum oxide) membrane, which improve a transparency for electron beam and uniformities in chamber sizes/distributions, respectively. We envision that the present work will enable us to efficiently observe nanoscale processes in liquid with high-resolution TEM.
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Related Researcher
- Lee, Won Chul
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)