Quality and reliability evaluation for nano-scaled devices

Abstract

In the next decade, reliability will be a key issue in nanofabrication due to the complex engineering and design of products along with the turbulent environment of change going on in nano-science. This research introduces adaptation of advanced statistical analysis toward nano-scaled display devices. This research will also catalyze further statistical modeling in nanofabrication outside of reliability. While currently there is little research on nano-science mentioned in the mainstream statistical literature, there is potential growth for design of experiments, robust estimation and statistical prediction within this framework. © 2006 IEEE.