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Effects of Hydrogen Peroxide(H2O2) on Frictional and Thermal Characteristics during Cu CMP
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진구 | - |
| dc.date.accessioned | 2021-06-23T22:41:21Z | - |
| dc.date.available | 2021-06-23T22:41:21Z | - |
| dc.date.created | 2021-02-18 | - |
| dc.date.issued | 2005-12-23 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/45449 | - |
| dc.publisher | Proceeding of CMP-MIC | - |
| dc.title | Effects of Hydrogen Peroxide(H2O2) on Frictional and Thermal Characteristics during Cu CMP | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 박진구 | - |
| dc.identifier.bibliographicCitation | Proceeding of CMP-MIC | - |
| dc.relation.isPartOf | Proceeding of CMP-MIC | - |
| dc.citation.title | Proceeding of CMP-MIC | - |
| dc.type.rims | ART | - |
| dc.description.journalClass | 3 | - |
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)