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A compensation of Young's modulus in polysilicon structure with discontinuous material distribution
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Dong-Chan | - |
| dc.contributor.author | Choi, Hyeun-Seok | - |
| dc.contributor.author | Han, Chang-Soo | - |
| dc.contributor.author | Jeong, Hee jun | - |
| dc.date.accessioned | 2021-06-23T22:42:07Z | - |
| dc.date.available | 2021-06-23T22:42:07Z | - |
| dc.date.issued | 2005-12 | - |
| dc.identifier.issn | 0167-577X | - |
| dc.identifier.issn | 1873-4979 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/45504 | - |
| dc.description.abstract | This paper is concerned with the effect of material discontinuities, such as porosity, on the modulus of elasticity and attempts to simulate the effects of porosity in polysilicon using a finite element model. The proposed Young's modulus model is applied to the simulation of a polysilicon MEMS gyro. When the compensated Young's modulus is used in this simulation, we can reduce the difference between the simulation and the actual experimental result. (C) 2005 Elsevier B.V. All rights reserved. | - |
| dc.format.extent | 4 | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.publisher | Elsevier BV | - |
| dc.title | A compensation of Young's modulus in polysilicon structure with discontinuous material distribution | - |
| dc.type | Article | - |
| dc.publisher.location | 네델란드 | - |
| dc.identifier.doi | 10.1016/j.matlet.2005.07.040 | - |
| dc.identifier.scopusid | 2-s2.0-26844464793 | - |
| dc.identifier.wosid | 000232864800023 | - |
| dc.identifier.bibliographicCitation | Materials Letters, v.59, no.29-30, pp 3900 - 3903 | - |
| dc.citation.title | Materials Letters | - |
| dc.citation.volume | 59 | - |
| dc.citation.number | 29-30 | - |
| dc.citation.startPage | 3900 | - |
| dc.citation.endPage | 3903 | - |
| dc.type.docType | Article | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Materials Science | - |
| dc.relation.journalResearchArea | Physics | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
| dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
| dc.subject.keywordPlus | ELASTIC PROPERTIES | - |
| dc.subject.keywordPlus | POROSITY | - |
| dc.subject.keywordAuthor | microstructure | - |
| dc.subject.keywordAuthor | material discontinuity | - |
| dc.subject.keywordAuthor | porosity | - |
| dc.subject.keywordAuthor | porous elasticity modulus | - |
| dc.subject.keywordAuthor | finite element model | - |
| dc.identifier.url | https://www.sciencedirect.com/science/article/pii/S0167577X05007044?via%3Dihub | - |
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- Jeong, Hee jun
- ERICA 첨단융합대학 (ERICA 지능정보양자공학전공)