Fabrication of a patterned replica by hot embossing on various thicknesses of PMMA
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Cha, Nam goo | - |
dc.contributor.author | Park, Chang hwa | - |
dc.contributor.author | Lim, Hyun woo | - |
dc.contributor.author | Park, Jin goo | - |
dc.date.accessioned | 2021-06-23T23:02:31Z | - |
dc.date.available | 2021-06-23T23:02:31Z | - |
dc.date.created | 2021-01-21 | - |
dc.date.issued | 2005-11 | - |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/45627 | - |
dc.description.abstract | We investigated the possibility of using hot embossing for polymer-based flexible substrates. A Si mold had a mixture of patterns from 1 mu m to 500 pm width and was imprinted on various thicknesses of PMMA. To obtain a good release process between the mold and replica, an antistiction layer was coated on the mold. All procedures were conducted in a clean room to ensure a particle-free result. Printing conditions were optimized as functions of process pressure and temperature plotted and calculated. Thin layers need a higher temperature and pressure than thick layers. The mold structures were successfully replicated into a PMMA substrate over the area of a 4-inch wafer. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | 한국물리학회 | - |
dc.title | Fabrication of a patterned replica by hot embossing on various thicknesses of PMMA | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Jin goo | - |
dc.identifier.scopusid | 2-s2.0-29344469383 | - |
dc.identifier.wosid | 000233805900037 | - |
dc.identifier.bibliographicCitation | Journal of the Korean Physical Society, v.47, pp.S530 - S534 | - |
dc.relation.isPartOf | Journal of the Korean Physical Society | - |
dc.citation.title | Journal of the Korean Physical Society | - |
dc.citation.volume | 47 | - |
dc.citation.startPage | S530 | - |
dc.citation.endPage | S534 | - |
dc.type.rims | ART | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Multidisciplinary | - |
dc.subject.keywordPlus | POLYMERS | - |
dc.subject.keywordAuthor | hot embossing | - |
dc.subject.keywordAuthor | nanoimprinting lithography (NIL) | - |
dc.subject.keywordAuthor | plastic substrate | - |
dc.identifier.url | https://www.jkps.or.kr/journal/view.html?uid=7401&vmd=Full | - |
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