Rubbed polyimide layers studied by rotating sample and compensator spectroscopic ellipsometry
- Authors
- Kyoung, Jaesun; Bang, Kyungyoon; Oh, Hyekeun.; Lee, Iksoo; Kim, Hochul; Jeon, Dong Ryul; An, Ilsin
- Issue Date
- Oct-2005
- Publisher
- IOP Publishing Ltd
- Keywords
- spectroscopy; compensator; ellipsometry; retardance; rubbing; polyimide
- Citation
- Japanese Journal of Applied Physics, v.44, no.10, pp 7667 - 7670
- Pages
- 4
- Indexed
- SCIE
SCOPUS
- Journal Title
- Japanese Journal of Applied Physics
- Volume
- 44
- Number
- 10
- Start Page
- 7667
- End Page
- 7670
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/45710
- DOI
- 10.1143/JJAP.44.7667
- ISSN
- 0021-4922
1347-4065
- Abstract
- Rotating compensator spectroscopic ellipsometry was used to study the optical properties of a rubbed polyimide layer. Two operating modes in the transmission configuration were studied. One was a conventional mode of 'polarizer-sample-rotating compensator-analyzer'. The other was a dual rotation mode of 'polarizer-rotating sample-rotating compensator-analyzer'. We found that calibration is not possible in the conventional mode due to the extremely small retardance and non-dichroic nature of the sample. Meanwhile, in dual rotation mode which we developed, a retardance smaller than 0.5 degrees could be measured without calibration. Using this technique, the variation in retardance with rubbing could be easily determined over a range of 320-800 nm. The optical axis could also be determined with high precision for this sample, and this optical axis was found to be parallel to the direction of rubbing.
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Collections - COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF PHOTONICS AND NANOELECTRONICS > 1. Journal Articles
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF APPLIED PHYSICS > 1. Journal Articles
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