Si multiprobes integrated with lateral actuators for independent scanning probe applications
- Authors
- Ahn, Yoomin; Ono, Takahito; Esashi, Masayoshi
- Issue Date
- Jun-2005
- Publisher
- IOP PUBLISHING LTD
- Citation
- JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.15, no.6, pp.1224 - 1229
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Volume
- 15
- Number
- 6
- Start Page
- 1224
- End Page
- 1229
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/45903
- DOI
- 10.1088/0960-1317/15/6/012
- ISSN
- 0960-1317
- Abstract
- Silicon SPM multiprobes having lateral actuators with a very small pitch were microfabricated and evaluated for independent parallel operations and nanomaterial characterizations. Two types of 1 x 4 probe array were developed. In order to treat smaller objects, the distance between each cantilever tip was produced to be as small as possible. The inter-tip distance is about 7 mu m. In addition, the cantilevers of the multiprobes had comb drive actuators that enable individual probes to move horizontally. More flexibility in SPM operation was obtained with these individual self-movement probes possibly opening up new applications in nanotechnology. Using the microfabricated multiprobes, the characterization of the electric properties of a carbon nanotube by a two-probe measurement and the manipulation of a microlens were demonstrated.
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