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Ohmic Contacts of Pd/Zn/Pt(or Pd)Au Materials to P-TYPE InP

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dc.contributor.authorHwang, Sungmin-
dc.contributor.authorJongin-
dc.contributor.author어영선-
dc.date.accessioned2021-06-23T23:38:09Z-
dc.date.available2021-06-23T23:38:09Z-
dc.date.created2021-02-18-
dc.date.issued2005-05-
dc.identifier.issn10928669-
dc.identifier.urihttps://scholarworks.bwise.kr/erica/handle/2021.sw.erica/45961-
dc.description.abstractWe investigated the contact resistivities of Au//M(=Pd or Pt)/Zn/Pd/p-InP, focusing on the role of the third metal, M. Both the lowest specific contact resistivity of 7/spl times/10/sup -6/ /spl Omega//spl middot/cm/sup 2/ and a flat diffusion front were obtained for a sample with a Au/Pt/Zn/Pd/p-InP contact material after annealing at 400/spl deg/C for 4 min.-
dc.language영어-
dc.language.isoen-
dc.publisherIEEE-
dc.titleOhmic Contacts of Pd/Zn/Pt(or Pd)Au Materials to P-TYPE InP-
dc.typeArticle-
dc.contributor.affiliatedAuthor어영선-
dc.identifier.doi10.1109/ICIPRM.2005.1517473-
dc.identifier.scopusid2-s2.0-33747422823-
dc.identifier.bibliographicCitationIPRM`05-
dc.relation.isPartOfIPRM`05-
dc.citation.titleIPRM`05-
dc.type.rimsART-
dc.description.journalClass3-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassother-
dc.identifier.urlhttps://ieeexplore.ieee.org/document/1517473-
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ERICA 공학대학 (SCHOOL OF ELECTRICAL ENGINEERING)
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