Rotating sample and compensator type spectroscopic ellipsometry for studies of rubbed polyimide layer

안일신

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Rotating sample and compensator type spectroscopic ellipsometry for studies of rubbed polyimide layer

Authors: 안일신

Issue Date: 26-Feb-2005

Publisher: 한국반도체학술대회

Citation: 한국반도체학술대회논문집

Journal Title: 한국반도체학술대회논문집

URI: https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/46074

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Appears in Collections: COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF PHOTONICS AND NANOELECTRONICS > 1. Journal Articles

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