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힘 및 변위 감지기구를 적용한 초정밀 가공시스템 개발Development of an Ultra Precision Machining System Using a Force and Displacement Sensing Module
- Other Titles
- Development of an Ultra Precision Machining System Using a Force and Displacement Sensing Module
- Issue Date
- Dec-2005
- Publisher
- 한국정밀공학회
- Keywords
- Ultra precision machining; Nanoindentation; Nanopatterning; Measurement; Ultra precision machining; Nanoindentation; Nanopatterning; Measurement; 초정밀 가공; 나노인덴테이션; 나노패터닝; 측정
- Citation
- 한국정밀공학회지, v.22, no.12, pp.42 - 50
- Indexed
- KCI
- Journal Title
- 한국정밀공학회지
- Volume
- 22
- Number
- 12
- Start Page
- 42
- End Page
- 50
- ISSN
- 1225-9071
- Files in This Item
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Related Researcher
- CHO, NAHM GYOO
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)