부스터를 이용한 3자유도 초정밀 위치결정 기구의 최적설계Optimum Design of a 3-DOF Ultra-Precision Positioning Mechanism Using Boosters
- Other Titles
- Optimum Design of a 3-DOF Ultra-Precision Positioning Mechanism Using Boosters
- Authors
- 한석영; 이병주; 김선정; 김종오; 정구봉
- Issue Date
- Dec-2005
- Publisher
- 한국생산제조학회
- Keywords
- Axiomatic Design; Optimal Design; Workspace; Natural Frequency; Flexure Hinge; Booster; 3 DOF Ultra-precision Mechanism; Axiomatic Design; Optimal Design; Workspace; Natural Frequency; Flexure Hinge; Booster; 3 DOF Ultra-precision Mechanism; 공리적 설계; 최적설계; 작업공간; 고유 진동수; 증폭기; 3자유도 초정밀 기구
- Citation
- 한국생산제조학회지, v.14, no.6, pp.101 - 109
- Indexed
- KCI
- Journal Title
- 한국생산제조학회지
- Volume
- 14
- Number
- 6
- Start Page
- 101
- End Page
- 109
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/46186
- ISSN
- 2508-5093
- Abstract
- Ultra-precision positioning systems basically require high natural frequency and sufficient workspace. To cope with this requirement, flexure hinge mechanisms have been proposed. However, previous designs are hard to satisfy the functional requirements of the system due to difficulty in modeling and optimizing process applying an independent axiomatic design. Therefore, this paper proposes a new design and design-order based on semi-coupled axiomatic design. A planar 3 DOF parallel type micro mechanism is chosen as an exemplary device. Based on preliminary kinematic analysis and dynamic modeling of the system, an optimal design has been carried out. To check the effectiveness of the optimal parameters obtained from theoretical approach, simulation is performed by FEM. The simulation result shows that a natural frequency of 200.53Hz and a workspace of 200μm x 200μm can be ensured, which is in very close agreement with the specified goal of design.
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