공리적 설계를 이용한 공간형 3자유도 기구의 최적설계

Abstract

Ultra-precision positioning systems basically require high natural frequency and sufficient workspace. To cope with this requirement, flexure hinge mechanisms have been developed. However, previous designs are difficult to satisfy the functional requirements of the system due to difficulty in modeling and optimization process applying for the independent axiomatic design. Therefore, this paper suggests a new design and design procedure based on semi-coupled, axiomatic design. A spatial 3-DOF parallel type micro mechanism is chosen as an exemplary device. Based on preliminary kinematic analysis and dynamic modeling of the system, an optimum design is conducted. To check the effectiveness of the optimal parameters obtained by theoretical approach, simulation has been performed by FEM.