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Experimental and modeling study of submicron particle removal from deep trenches
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Bakhtari, K. | - |
| dc.contributor.author | Guldiken, R.O. | - |
| dc.contributor.author | Busnaina, A.A. | - |
| dc.contributor.author | Park, J.G. | - |
| dc.date.accessioned | 2021-06-24T00:08:30Z | - |
| dc.date.available | 2021-06-24T00:08:30Z | - |
| dc.date.created | 2021-02-01 | - |
| dc.date.issued | 2005 | - |
| dc.identifier.issn | 0000-0000 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/46464 | - |
| dc.description.abstract | [No abstract available] | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.title | Experimental and modeling study of submicron particle removal from deep trenches | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Park, J.G. | - |
| dc.identifier.scopusid | 2-s2.0-84883402484 | - |
| dc.identifier.bibliographicCitation | 2005 Proceedings - 10th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2005, pp.244 - 247 | - |
| dc.relation.isPartOf | 2005 Proceedings - 10th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2005 | - |
| dc.citation.title | 2005 Proceedings - 10th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2005 | - |
| dc.citation.startPage | 244 | - |
| dc.citation.endPage | 247 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Conference Paper | - |
| dc.description.journalClass | 1 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scopus | - |
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)