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Metrology and removal of nanoparticles from 500 micron deep trenches
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Guldiken, Rasim Oytun | - |
| dc.contributor.author | Bakhtari, Kaveh | - |
| dc.contributor.author | Busnaina, Ahmed A. | - |
| dc.contributor.author | Park, Jin goo | - |
| dc.date.accessioned | 2021-06-24T00:37:38Z | - |
| dc.date.available | 2021-06-24T00:37:38Z | - |
| dc.date.issued | 2005-00 | - |
| dc.identifier.issn | 1012-0394 | - |
| dc.identifier.issn | 1662-9779 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/46504 | - |
| dc.format.extent | 4 | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.publisher | Scitec Publications Ltd. | - |
| dc.title | Metrology and removal of nanoparticles from 500 micron deep trenches | - |
| dc.type | Article | - |
| dc.publisher.location | 스위스 | - |
| dc.identifier.doi | 10.4028/www.scientific.net/SSP.103-104.137 | - |
| dc.identifier.scopusid | 2-s2.0-33750116155 | - |
| dc.identifier.wosid | 000230349000031 | - |
| dc.identifier.bibliographicCitation | Solid State Phenomena, v.103-104, pp 137 - 140 | - |
| dc.citation.title | Solid State Phenomena | - |
| dc.citation.volume | 103-104 | - |
| dc.citation.startPage | 137 | - |
| dc.citation.endPage | 140 | - |
| dc.type.docType | Article; Proceedings Paper | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Materials Science | - |
| dc.relation.journalResearchArea | Physics | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
| dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
| dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
| dc.subject.keywordAuthor | surface cleaning | - |
| dc.subject.keywordAuthor | nanoparticles | - |
| dc.subject.keywordAuthor | trenches | - |
| dc.subject.keywordAuthor | fluorescent particles metrology | - |
| dc.identifier.url | https://www.scientific.net/SSP.103-104.137 | - |
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)