The design and characterization of a piezo-driven inchworm linear motor with a reduction-lever mechanism
- Authors
- Kwon, Kihwan; Cho, Nahmgyoo; Jang, Woojin
- Issue Date
- Sep-2004
- Publisher
- JAPAN SOC MECHANICAL ENGINEERS
- Keywords
- piezoelectric actuator; inchworm linear motor; lever mechanism; precision positioning
- Citation
- JSME INTERNATIONAL JOURNAL SERIES C-MECHANICAL SYSTEMS MACHINE ELEMENTS AND MANUFACTURING, v.47, no.3, pp.803 - 811
- Indexed
- SCIE
SCOPUS
- Journal Title
- JSME INTERNATIONAL JOURNAL SERIES C-MECHANICAL SYSTEMS MACHINE ELEMENTS AND MANUFACTURING
- Volume
- 47
- Number
- 3
- Start Page
- 803
- End Page
- 811
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/46560
- DOI
- 10.1299/jsmec.47.803
- ISSN
- 1344-7653
- Abstract
- A piezo-driven inchworm linear motor with a reduction lever mechanism has been designed and characterized. The inchworm motor consists of two clamping devices for gripping a moving shaft and one push-pull device operated by three piezoelectric stacks. To reduce positioning errors caused by control voltage fluctuations and to improve positioning accuracy, a reduction lever mechanism with a monolithic flexure structure is employed to the push-pull device. For the design analysis of the push-pull and clamping devices, their analytical models and equations were developed, by which the static characteristics were evaluated. The positioning performances of the inchworm motor assembled with the push-pull and clamping devices were experimentally characterized. The developed inchworm linear motor proved effective not only in performing a step movement of 1 nm up to 82.5 nm, with the step size optionally adjusted, but also in providing ultra high positioning accuracy.
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