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Optical properties of the SiO-Co composite thin films
- Authors
- Lee, Jaeho; Bang, Kyoung-Yoon; Kim, Ok-Kyung; Oh, Hye-Keun; An, Ilsin; Choi, Chaungi; Park, Chang-Won
- Issue Date
- Mar-2003
- Publisher
- IOP Publishing Ltd
- Keywords
- SiO; cobalt; ellipsometry; effective medium theory
- Citation
- Japanese Journal of Applied Physics, v.42, no.3, pp 1416 - 1417
- Pages
- 2
- Indexed
- SCIE
SCOPUS
- Journal Title
- Japanese Journal of Applied Physics
- Volume
- 42
- Number
- 3
- Start Page
- 1416
- End Page
- 1417
- ISSN
- 0021-4922
1347-4065
- Abstract
- Spectroscopic ellipsometry (SE) and X-ray photoelectron spectroscopy (XPS) were employed to study the composite thin films of SiO and cobalt (Co) prepared by sputtering technique. The optical properties of these films could be expressed as mixtures of SiO and Co using effective medium approximation (EMA) by Bruggeman. When the compositional properties of films analyzed by EMA and XPS were compared, the optical volume of SiO was found to be 5.47 times greater than that of Co.
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