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Development of multichannel ellipsometry with synchronously rotating polarizer and analyzer
- Issue Date
- Jun-2002
- Publisher
- IOP Publishing Ltd
- Keywords
- multichannel; spectroscopic; ellipsometry; calibration; rotating
- Citation
- Japanese Journal of Applied Physics, v.41, no.6A, pp 3978 - 3980
- Pages
- 3
- Indexed
- SCIE
SCOPUS
- Journal Title
- Japanese Journal of Applied Physics
- Volume
- 41
- Number
- 6A
- Start Page
- 3978
- End Page
- 3980
- ISSN
- 0021-4922
1347-4065
- Abstract
- Rotating-polaizer-and-analyzer-ellipsometry was developed with a multichannel detector. In this system the transmission axes of the polarizer and analyzer rotated in phase using a flexible shaft for mechanical connection. With this configuration. autocalibration for the azimuths of the polarizer and analyzer was achieved, Thus. experimental error related to the calibration could be avoided and spectroscopic ellipsometry with the simplest operation principle realized. Data acquisition time for 512-point ellipsometry spectra was 3 s over the photon energy range of 1.5 to 4.5 eV.
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