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Development of multichannel ellipsometry with synchronously rotating polarizer and analyzer

Authors
An, IlsinPark, Myung-GyuBang, Kyung-YoonOh, Hye-KeunKim, Hanjung
Issue Date
Jun-2002
Publisher
IOP Publishing Ltd
Keywords
multichannel; spectroscopic; ellipsometry; calibration; rotating
Citation
Japanese Journal of Applied Physics, v.41, no.6A, pp 3978 - 3980
Pages
3
Indexed
SCIE
SCOPUS
Journal Title
Japanese Journal of Applied Physics
Volume
41
Number
6A
Start Page
3978
End Page
3980
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/46813
DOI
10.1143/JJAP.41.3978
ISSN
0021-4922
1347-4065
Abstract
Rotating-polaizer-and-analyzer-ellipsometry was developed with a multichannel detector. In this system the transmission axes of the polarizer and analyzer rotated in phase using a flexible shaft for mechanical connection. With this configuration. autocalibration for the azimuths of the polarizer and analyzer was achieved, Thus. experimental error related to the calibration could be avoided and spectroscopic ellipsometry with the simplest operation principle realized. Data acquisition time for 512-point ellipsometry spectra was 3 s over the photon energy range of 1.5 to 4.5 eV.
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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF APPLIED PHYSICS > 1. Journal Articles

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