Characterization of undoped and Cu-doped ZnO films for surface acoustic wave applications
DC Field | Value | Language |
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dc.contributor.author | Lee, Jin bock | - |
dc.contributor.author | Lee, Hye jung | - |
dc.contributor.author | Seo, Soo hyung | - |
dc.contributor.author | Park, Jin seok | - |
dc.date.accessioned | 2021-06-24T01:04:29Z | - |
dc.date.available | 2021-06-24T01:04:29Z | - |
dc.date.created | 2021-01-21 | - |
dc.date.issued | 2001-11 | - |
dc.identifier.issn | 0040-6090 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/46876 | - |
dc.description.abstract | Cu-doped ZnO (denoted by ZnO:Cu) films have been prepared by RF magnetron co-sputtering of a ZnO target with some Cu-chips attached. X-Ray diffraction (XRD) spectra of deposited ZnO:Cu films were measured and texture coefficient (TC) values for (002)-orientation were estimated. Optimal ranges of RF powers and substrate temperatures for obtaining high TC values were determined. Effects of Cu-doping conditions (such as Cu-chip sputtering areas and O-2/(Ar+O-2) mixing ratios) on TC values, electrical resistivities, and relative Cu-compositions of deposited films have been systematically investigated. X-Ray photoelectron spectroscopy (XPS) study suggests that the relative densities of metallic copper (Cu-0) atoms and CuO (Cu2+)-phases within deposited films may play an important role in determining their electrical resistivities. Highly resistive (> 10(10) Omega cm) ZnO films with high TC values (> 80%) can be achieved by Cu-doping. Surface acoustic wave (SAW) devices with ZnO:Cu (or ZnO)/interdigital transducer (IDT)/SiO2/Si configuration were also fabricated to estimate the effective electro-mechanical coupling coefficient (k(eff)(2)) and insertion loss. The devices using Cu-doped ZnO films have higher k(eff)(2), and lower insertion loss, compared with those using undoped films. (C) 2001 Elsevier Science B.V. All rights reserved. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.title | Characterization of undoped and Cu-doped ZnO films for surface acoustic wave applications | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Jin seok | - |
dc.identifier.doi | 10.1016/S0040-6090(01)01332-3 | - |
dc.identifier.scopusid | 2-s2.0-17544404553 | - |
dc.identifier.wosid | 000172906200111 | - |
dc.identifier.bibliographicCitation | THIN SOLID FILMS, v.398, pp.641 - 646 | - |
dc.relation.isPartOf | THIN SOLID FILMS | - |
dc.citation.title | THIN SOLID FILMS | - |
dc.citation.volume | 398 | - |
dc.citation.startPage | 641 | - |
dc.citation.endPage | 646 | - |
dc.type.rims | ART | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | DEVICES | - |
dc.subject.keywordPlus | DIAMOND | - |
dc.subject.keywordPlus | COPPER | - |
dc.subject.keywordPlus | LINBO3 | - |
dc.subject.keywordPlus | MODE | - |
dc.subject.keywordAuthor | Cu-doped ZnO | - |
dc.subject.keywordAuthor | RF magnetron sputtering | - |
dc.subject.keywordAuthor | c-axis growth | - |
dc.subject.keywordAuthor | electrical resistivity | - |
dc.subject.keywordAuthor | surface acoustic wave | - |
dc.subject.keywordAuthor | electro-mechanical coupling coefficient | - |
dc.subject.keywordAuthor | insertion loss | - |
dc.identifier.url | https://www.sciencedirect.com/science/article/pii/S0040609001013323?via%3Dihub | - |
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