Mechanical property measurement of electroplated gold microstructure using resonance method

Abstract

Mechanical properties of electroplated gold microstructures were determined by measuring resonance frequencies of microbeams. Cantilever and bridge beam structures of different lengths were fabricated by electroplating surface micromachining technique, specially designed to realize an ideal fixed-boundary anchor. Fabricated beams were electrostatically excited and their resonance frequencies were measured by optical system composed of laser displacement meter with dynamic signal analyzer. Young's modulus, residual stress were calculated from the measured frequency data.