Effect of dissolved oxygen on removal of benzotriazole from co during a post-co cmp cleaning
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ryu, Heon Yul | - |
dc.contributor.author | Jalalzai, Palwasha | - |
dc.contributor.author | Yerriboina, Nagendra Prasad | - |
dc.contributor.author | Kim, Tae Gon | - |
dc.contributor.author | Hamada, Satomi | - |
dc.contributor.author | Park, Jin Goo | - |
dc.date.accessioned | 2021-06-22T04:27:21Z | - |
dc.date.available | 2021-06-22T04:27:21Z | - |
dc.date.created | 2021-05-10 | - |
dc.date.issued | 2021 | - |
dc.identifier.issn | 1012-0394 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/575 | - |
dc.description.abstract | A systematic study of the adsorption of benzotriazole on Co surface and its removal in aqueous solutions was carried out for post-CMP cleaning application. Static etch rate (SER) measurements and electrochemical impedance spectroscopy (EIS) were employed. The experimental results show that BTA adsorbed well on Co surface when it exposed to BTA solution at neutral and alkaline pH. BTA did not adsorb due to active Co dissolution at acidic pH. The effect of dissolved oxygen (DO) concentration in de-ionized (DI) water on the removal of Co-BTA complex layer was investigated. At the DI water rinse process after BTA treatment, Co-BTA layer was maintained on Co surface when DO concentration of DI water was low. Interestingly, BTA was removed by DI water with high DO concentration. © 2021 Trans Tech Publications Ltd, Switzerland. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | Trans Tech Publications Ltd | - |
dc.title | Effect of dissolved oxygen on removal of benzotriazole from co during a post-co cmp cleaning | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Jin Goo | - |
dc.identifier.doi | 10.4028/www.scientific.net/SSP.314.270 | - |
dc.identifier.scopusid | 2-s2.0-85102005654 | - |
dc.identifier.bibliographicCitation | Solid State Phenomena, v.314 SSP, pp.270 - 274 | - |
dc.relation.isPartOf | Solid State Phenomena | - |
dc.citation.title | Solid State Phenomena | - |
dc.citation.volume | 314 SSP | - |
dc.citation.startPage | 270 | - |
dc.citation.endPage | 274 | - |
dc.type.rims | ART | - |
dc.type.docType | Conference Paper | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scopus | - |
dc.subject.keywordPlus | Alkalinity | - |
dc.subject.keywordPlus | Biochemical oxygen demand | - |
dc.subject.keywordPlus | Cobalt compounds | - |
dc.subject.keywordPlus | Electrochemical impedance spectroscopy | - |
dc.subject.keywordPlus | Alkaline pH | - |
dc.subject.keywordPlus | Benzotriazoles | - |
dc.subject.keywordPlus | Co dissolution | - |
dc.subject.keywordPlus | Dissolved oxygen concentrations | - |
dc.subject.keywordPlus | DO concentration | - |
dc.subject.keywordPlus | Post-CMP cleaning | - |
dc.subject.keywordPlus | Systematic study | - |
dc.subject.keywordPlus | Water rinse | - |
dc.subject.keywordPlus | Dissolved oxygen | - |
dc.subject.keywordAuthor | Adsorption | - |
dc.subject.keywordAuthor | Benzotriazole | - |
dc.subject.keywordAuthor | Cobalt | - |
dc.subject.keywordAuthor | Dissolved oxygen | - |
dc.subject.keywordAuthor | Post Co-CMP cleaning | - |
dc.identifier.url | https://www.scientific.net/SSP.314.270 | - |
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