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정밀 선형 라인프로파일 측정기 적용을 위한 푸리에급수 기반 멀티프로브 오차분리 알고리즘 분석Fourier Series Based Multi-probe Error Separation Algorithm Analysis for Precision Linear Line Profile Measuring Instrument
- Other Titles
- Fourier Series Based Multi-probe Error Separation Algorithm Analysis for Precision Linear Line Profile Measuring Instrument
- Issue Date
- May-2018
- Publisher
- 한국정밀공학회
- Keywords
- Line-profile meter; Linear motion device; Error separation; Frequency domaion multi-probe method; Harmonic distortion phenomenon
- Citation
- 한국정밀공학회 2018년도 춘계학술대회 논문집, pp.292 - 292
- Indexed
- OTHER
- Journal Title
- 한국정밀공학회 2018년도 춘계학술대회 논문집
- Start Page
- 292
- End Page
- 292
- Files in This Item
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Related Researcher
- CHO, NAHM GYOO
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)