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Atomic Layer Deposition of Pt on Surface Deactivated by Fluorocarbon Implantation: Investigation of Growth Mechanism
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김우희 | - |
| dc.date.accessioned | 2021-06-22T04:45:17Z | - |
| dc.date.available | 2021-06-22T04:45:17Z | - |
| dc.date.created | 2021-02-18 | - |
| dc.date.issued | 2020-11-03 | - |
| dc.identifier.issn | 0897-4756 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/762 | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | AMER CHEMICAL SOC | - |
| dc.title | Atomic Layer Deposition of Pt on Surface Deactivated by Fluorocarbon Implantation: Investigation of Growth Mechanism | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 김우희 | - |
| dc.identifier.bibliographicCitation | CHEMISTRY OF MATERIALS, v.32, no.22, pp.9696 - 9703 | - |
| dc.relation.isPartOf | CHEMISTRY OF MATERIALS | - |
| dc.citation.title | CHEMISTRY OF MATERIALS | - |
| dc.citation.volume | 32 | - |
| dc.citation.number | 22 | - |
| dc.citation.startPage | 9696 | - |
| dc.citation.endPage | 9703 | - |
| dc.type.rims | ART | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
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Related Researcher
- Kim, Woo Hee
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)