Device Scalability of InGaZnO TFTs for Next-Generation Displays
DC Field | Value | Language |
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dc.contributor.author | Oh, Saeroonter | - |
dc.contributor.author | Kim, Su hyun | - |
dc.contributor.author | Kim, Mingoo | - |
dc.contributor.author | Yu, Sangmin | - |
dc.contributor.author | Choi, Youngjoon | - |
dc.contributor.author | Park, Joon seok | - |
dc.contributor.author | Lim, Jun hyung | - |
dc.date.accessioned | 2021-06-22T05:59:06Z | - |
dc.date.available | 2021-06-22T05:59:06Z | - |
dc.date.created | 2021-02-18 | - |
dc.date.issued | 2020-10 | - |
dc.identifier.issn | 1938-5862 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/819 | - |
dc.description.abstract | Device scaling of thin-film transistors has only recently gained attention, as the need has grown for shorter channel lengths in hybrid integration applications as well as a performance enhancer in future displays. In this study, we study the device scalability of shortchannel top-gate oxide TFTs down to 1 mm, with particular focus on the carrier profile at the channel edges. We propose a carrier profile extraction method by utilizing comprehensive simulation fitting of the effective channel length, threshold voltage roll-off to the measured and extracted values. We find that the effective channel length plays an important role at short-channel lengths, and the scalability can be improved by adjusting the process-dependent carrier concentration profile. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | Electrochemical Society | - |
dc.title | Device Scalability of InGaZnO TFTs for Next-Generation Displays | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Oh, Saeroonter | - |
dc.identifier.doi | 10.1149/09807.0047ecst | - |
dc.identifier.scopusid | 2-s2.0-85097334371 | - |
dc.identifier.bibliographicCitation | ECS Transactions, v.98, no.7, pp.47 - 54 | - |
dc.relation.isPartOf | ECS Transactions | - |
dc.citation.title | ECS Transactions | - |
dc.citation.volume | 98 | - |
dc.citation.number | 7 | - |
dc.citation.startPage | 47 | - |
dc.citation.endPage | 54 | - |
dc.type.rims | ART | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scopus | - |
dc.identifier.url | https://iopscience.iop.org/article/10.1149/09807.0047ecst/meta | - |
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