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Oxygen plasma reactive ion etching of tetrahedral amorphous carbon
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Park, JS
; Milne, WI
Article
Issue Date
1996
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, v.35, no.12A, pp.L1550 - L1553
Publisher
JAPAN SOC APPLIED PHYSICS
1
Discover
Author
Milne, WI
1
Subject
COMPRESSIVE-STRESS
1
DIAMOND-LIKE CARBON
1
DIODES
1
FILMS
1
filtered cathodic vacuum arc
1
oxygen plasma
1
reactive ion etching
1
substrate bias
1
tetrahedral amorphous carbon
1
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Article
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Japanese Journal of Applied Physics
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