SURFACE FINISHING OF NANOSCRATCH PATTERNS ON COATED PYREX GLASSES USING MAF
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Seoung Hwan | - |
dc.date.accessioned | 2021-06-22T14:03:22Z | - |
dc.date.available | 2021-06-22T14:03:22Z | - |
dc.date.created | 2021-01-21 | - |
dc.date.issued | 2017-06 | - |
dc.identifier.issn | 0218-625X | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/9573 | - |
dc.description.abstract | We investigate a surface finishing scheme fitted for AFM scratched nanopatterns on a coated surface using magnetic abrasive finishing (MAF). First, nanoscale patterning was carried out on IZO-coated Pyrex glass, with a specially-designed AFM machining setup. After AFM machining, nonuniform surface features such as pile-ups are generated, and the final shapes are often more complicated for coated materials. For this reason, MAF was implemented for the nanoscale removal of pile-up/debris of coated materials and design of experiment (DOE) was utilized to obtain optimal process conditions for the finishing process. The process was monitored using acoustic emission (AE) for coating-substrate (glass) boundary detection, as well for monitoring the polishing status/depth. Experimental results indicate the viability of the proposed scheme as a nanoscale selective finishing technique for various material setups. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | WORLD SCIENTIFIC PUBL CO PTE LTD | - |
dc.title | SURFACE FINISHING OF NANOSCRATCH PATTERNS ON COATED PYREX GLASSES USING MAF | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Lee, Seoung Hwan | - |
dc.identifier.doi | 10.1142/S0218625X17500433 | - |
dc.identifier.scopusid | 2-s2.0-84983785848 | - |
dc.identifier.wosid | 000402864700003 | - |
dc.identifier.bibliographicCitation | SURFACE REVIEW AND LETTERS, v.24, no.4 | - |
dc.relation.isPartOf | SURFACE REVIEW AND LETTERS | - |
dc.citation.title | SURFACE REVIEW AND LETTERS | - |
dc.citation.volume | 24 | - |
dc.citation.number | 4 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Physical | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.subject.keywordPlus | ACOUSTIC-EMISSION | - |
dc.subject.keywordPlus | SIMULATION | - |
dc.subject.keywordPlus | FRICTION | - |
dc.subject.keywordPlus | SILICON | - |
dc.subject.keywordAuthor | MAF | - |
dc.subject.keywordAuthor | nano finishing | - |
dc.subject.keywordAuthor | IZO coated pyrex glass | - |
dc.subject.keywordAuthor | DOE | - |
dc.subject.keywordAuthor | acoustic emission monitoring | - |
dc.subject.keywordAuthor | coating boundary detection | - |
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