SURFACE FINISHING OF NANOSCRATCH PATTERNS ON COATED PYREX GLASSES USING MAF
- Authors
- Lee, Seoung Hwan
- Issue Date
- Jun-2017
- Publisher
- WORLD SCIENTIFIC PUBL CO PTE LTD
- Keywords
- MAF; nano finishing; IZO coated pyrex glass; DOE; acoustic emission monitoring; coating boundary detection
- Citation
- SURFACE REVIEW AND LETTERS, v.24, no.4
- Indexed
- SCIE
SCOPUS
- Journal Title
- SURFACE REVIEW AND LETTERS
- Volume
- 24
- Number
- 4
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/9573
- DOI
- 10.1142/S0218625X17500433
- ISSN
- 0218-625X
- Abstract
- We investigate a surface finishing scheme fitted for AFM scratched nanopatterns on a coated surface using magnetic abrasive finishing (MAF). First, nanoscale patterning was carried out on IZO-coated Pyrex glass, with a specially-designed AFM machining setup. After AFM machining, nonuniform surface features such as pile-ups are generated, and the final shapes are often more complicated for coated materials. For this reason, MAF was implemented for the nanoscale removal of pile-up/debris of coated materials and design of experiment (DOE) was utilized to obtain optimal process conditions for the finishing process. The process was monitored using acoustic emission (AE) for coating-substrate (glass) boundary detection, as well for monitoring the polishing status/depth. Experimental results indicate the viability of the proposed scheme as a nanoscale selective finishing technique for various material setups.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MECHANICAL ENGINEERING > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/9573)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.