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반도체 공정용 차압식 질량 유량 제어 장치의 개발 및 성능 평가
Go to Link
안진홍; 강기태; 안강호
Article
Issue Date
2008
Citation
반도체디스플레이기술학회지, v.7, no.3, pp.29 - 34
Publisher
한국반도체디스플레이기술학회
반도체 공정용 차압식 질량 유량 제어 장치의 개발
안강호
Conference
Issue Date
2008
Citation
한국반도체 및 디스플레이장비학회 2008년 춘계학술대회
Publisher
한국반도체 및 디스플레이장비학회
Place
강원도 횡성
반도체 제조 환경 클린룸 내 나노 입자 모니터링을 위한 고 유량 응축 핵 계수기의 개발 및 특성 평가
안강호
Conference
Issue Date
2008
Citation
한국반도체 및 디스플레이장비학회 2008년 춘계학술대회
Publisher
한국반도체 및 디스플레이장비학회
Place
강원도 횡성
Variation of SMPS data in the Unsteady Particle Concentration Condition
안강호
Conference
Issue Date
2008
Citation
AAAR 27th Annual Conference
Publisher
AAAR
Place
Orlando, Florida, USA
Characterization of a High Flow Rate Water Based Condensation Particle Counter for Clean-Room Monitoring
안강호
Conference
Issue Date
2008
Citation
AAAR 27th Annual Conference
Publisher
AAAR
Place
Orlando, Florida, USA
Particle Size Distribution Measurement in Exhaust Gases of Burn-Wet Scrubber for Semicondector Fabrication Environment
안강호
Conference
Issue Date
2008
Citation
AAAR 27th Annual Conference
Publisher
AAAR
Place
Orlando, Florida, USA
Observation of single NaCl Particle Hygroscopic Characteristics on a Glass and Paraffin Plate
안강호
Article
Issue Date
2008
Citation
European Aerosol Conference 2008
Publisher
European Aerosol Assembly
사무용기기에서 패턴별 인쇄 시 발생되는 미세입자 측정 및 분석방법 연구
안강호
Article
Issue Date
2008
Citation
2008년도 한국입자에어로졸학회 학술대회
Publisher
한국입자에어로졸학회
Design and Performance Evaluation of a Unipolar Charger via Soft X-ray
안강호
Article
Issue Date
2008
Citation
European Aerosol Conference 2008
Publisher
Europian Aerosol Assembly
Variation of SMPS data in the unsteady particle concentration condition
안강호
Article
Issue Date
2008
Citation
European Aerosol Conference 2008
Publisher
European Aerosol Assembly
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