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반도체 공정용 차압식 질량 유량 제어 장치의 개발 및 성능 평가
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안진홍; 강기태; 안강호
Article
Issue Date
2008
Citation
반도체디스플레이기술학회지, v.7, no.3, pp.29 - 34
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한국반도체디스플레이기술학회
OTHER
대기중 입자 측정을 위한 광대역(0.01-5.0㎛) 계측기(WAPS) 개발 및 수원 지역 대기 입자 분포 측정 연구
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강기태; 안진홍; 윤진욱; 권용택; 전기수; 안강호
Article
Issue Date
2008
Citation
한국대기환경학회 학술대회논문집, pp.272 - 273
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한국대기환경학회
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