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Deep RIE(reactive ion etching)를 이용한 가스 유량센서 제작
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이영태; 안강호; 권용택; Hidekuni Takao; Makoto Ishida
Article
Issue Date
2006
Citation
한국반도체및디스플레이장비학회 학술대회논문집
Publisher
한국반도체디스플레이기술학회
KCI
OTHER
ICP-RIE 기술을 이용한 차압형 가스유량센서 제작
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이영태; 안강호; 권용택; Hidekuni Takao; Makoto Ishida
Article
Issue Date
2008
Citation
반도체디스플레이기술학회지, v.7, no.1, pp.1 - 5
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한국반도체디스플레이기술학회
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Hidekuni Takao
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이영태
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Deep RIE
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Diaphragm
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Etch-stop
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Flow sensor
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Piezoresistor
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2006
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Korean
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한국반도체및디스플레이장비학회 학술대회논문집
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