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Results 1-1 of 1 (Search time: 0.002 seconds).
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The hydrophilization of process wafers in dilute hydrogen peroxide solutions and ozonated deionized water and its effects on defects and gate oxide integrity
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Park, JG
Article
Issue Date
1997
Citation
Japanese Journal of Applied Physics, v.36, no.9A, pp.5416 - 5420
Publisher
IOP Publishing Ltd
1
Discover
Subject
breakdown field strength
1
dilute H2O2 solutions
1
HF last wet cleaning
1
MARKS
1
ozonated DI water
1
OZONE
1
SILICON
1
SURFACE
1
water marks
1
Date Issued
1997
1
Language
English
1
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