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층간절연막 적용을 위한 Polyimide의 화학기계적 평탄화 공정
박진구
Conference
Issue Date
1998
The Reaction of H202 and Ozone in Ammonium Hydroxide (NH4OH) Solutions with Silicon Wafers
박진구
Conference
Issue Date
1999
Place
hawaii
Perfluorinated Organic Films For ThePrevention of Stiction in MEMS
박진구
Conference
Issue Date
1997
초순수수내에서의 오존의 거동 및 세정효과
박진구
Conference
Issue Date
1996
Determination of optical properties of fluorocarbon polymer thin films by a variable angle spectroscopic ellipsometry
박진구
Conference
Issue Date
1999
Place
Boston, Massachusetts
Electrokinetic analysis of slurry particles and wafer surfaces and their interactions relevant to post cmp cleaning.
박진구
Conference
Issue Date
1999
Place
동경(일본)
Interfacial characteristics of silicon in IPA-water solution and their significance in particle removal
박진구
Conference
Issue Date
1992
The application of ozonated DI water tothe pregate oxidation wet cleaning forthe prevention of water marks
박진구
Conference
Issue Date
1996
불화 유기 박막의 기상증착 및 특성평가
박진구
Conference
Issue Date
1998
Wettability of Silicon Waters in CholineSolutions
박진구
Conference
Issue Date
1992
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