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Effects of intermediate GAZO layer thickness on the properties of GAZO/Ag/GAZO/Ag/GAZO film
- Authors
- Jung, Yu Sup; Choi, Hyung Wook; Kim, Kyung Hwan
- Issue Date
- 31-Dec-2013
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- GAZO/Ag/GAZO/Ag/GAZO multilayer; Intermediate GAZO thin film layer; Facing targets sputtering
- Citation
- THIN SOLID FILMS, v.549, pp.70 - 73
- Journal Title
- THIN SOLID FILMS
- Volume
- 549
- Start Page
- 70
- End Page
- 73
- ISSN
- 0040-6090
- Abstract
- GAZO/Ag/GAZO/Ag/GAZO transparent conductive multilayer films were deposited by facing-target sputtering (FTS) methods at room temperature. As-deposited multilayer thin films consisted of Ag metal thin film layers and transparent conductive GAZO thin film layers. The fabricated multilayer thin films have a low sheet resistance and a high transmittance in the visible range. As a result, the sheet resistance, average transmittance in the visible range, and FOM (figure of merit) of the fabricated multilayer thin film with optimal layer thicknesses (50/12/75/12/50 nm) were 2.7 Omega/sq, 82%, and 4.9 x 10(-2) Omega(-1), respectively (T: 0.82, R-sh: 2.7 Omega/sq). (C) 2013 Elsevier B. V. All rights reserved.
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Related Researcher
- Choi, Hyung Wook
- College of IT Convergence (Department of Electrical Engineering)